Stress-induced warpage in micro-accelerometers

作者： Avner Friedman

关键词: Neutral plane 、 Accelerometer 、 Silicon nitride 、 Stress induced 、 Composite material 、 Materials science

摘要:

参考文章(6)

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Gary X. Li, Ron J. Gutteridge, Dan N. Koury, Zhenjun Zhang, Ray M. Roop, Stress-induced warpage and the compensation in a composite microaccelerometer Proceedings of SPIE. ,vol. 2882, pp. 147- 151 ,(1996) , 10.1117/12.250697

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Avner Friedman, Mathematics in Industrial Problems The IMA Volumes in Mathematics and its Applications. ,(1994) , 10.1007/978-1-4613-8383-3