作者: F MUNOZ , A DURAN , L PASCUAL , L MONTAGNE , B REVEL
DOI: 10.1016/J.SSI.2008.04.004
关键词: Activation energy 、 Conductivity 、 Thermal treatment 、 Lithium 、 Nitrogen 、 Ammonia 、 Nitriding 、 Inorganic chemistry 、 Materials science 、 Electrical resistivity and conductivity
摘要: … The synthesis of LiPON thin-film electrolytes by sputtering of crystalline Li 3 PO 4 targets in … on LiPON solid electrolytes as well as other related compounds, eg LiSiPON [4], [5]. LiPON …