Radio Frequency Planar Inductively Coupled Plasma: Fundamentals and Applications
作者： Kanesh Kumar Jayapalan , Oi Hoong Chin , Chiow San Wong
DOI: 10.1007/978-981-10-4217-1_10
关键词: Planar 、 Inductively coupled plasma atomic emission spectroscopy 、 Plasma 、 Inductively coupled plasma 、 Radio frequency 、 Computational physics 、 Hysteresis 、 Power Balance 、 Electromagnetic field 、 Materials science
摘要: This chapter examines some of the key fundamentals planar radio frequency inductively coupled plasmas (or RF ICPs) including various modes operation, hysteresis between modes, power balance plasma operating states and dynamics source electromagnetic fields in presence plasma. These properties are discussed with demonstration several theoretical models. The characteristics effects neutral gas heating, as well technique measurement temperature also presented. is concluded a discussion on applications ICPs their development throughout years.
springer.com
sci-hub.se 参考文章(97)
Angelo B. Mingarelli, Frederick V. Atkinson, Multiparameter Eigenvalue Problems: Sturm-Liouville Theory ,(2010)
David L. Book, NRL Plasma Formulary. Revision Defense Technical Information Center. ,(1990) , 10.21236/ADA247840
Michael A Lieberman, Alan J Lichtenberg, Principles of Plasma Discharges and Materials Processing ,(1994)
K.A. MacKinnon, LXVI. On the origin of the electrodeless discharge Philosophical Magazine Series 1. ,vol. 8, pp. 605- 616 ,(1929) , 10.1080/14786441108564921
Pascal Chabert, Nicholas Braithwaite, Physics of radio-frequency plasmas prfp. ,(2011) , 10.1017/CBO9780511974342
S. Xu, Z. Tskadze, J.D. Long, K. Ostrikov, N. Jiang, Low temperature growth of vertically aligned carbon nanofibres in a low frequency inductively coupled plasma reactor conference on optoelectronic and microelectronic materials and devices. pp. 177- 180 ,(2002) , 10.1109/COMMAD.2002.1237221
Masashi Shimada, Experimental and numerical studies of neutral gas depletion in an inductively coupled plasma Ph.D. Thesis. ,(2006)
Howard E. Taylor, Inductively Coupled Plasma-Mass Spectrometry: Practices and Techniques ,(2000)