Graded dielectric layers
作者： Dan Gealy , Vishwanath Bhat , Cancheepuram Srividya , M. Rocklein
DOI:
关键词: Atomic layer deposition 、 Dielectric layer 、 Optoelectronics 、 Electronic engineering 、 High-κ dielectric 、 Crystal structure 、 Dielectric 、 Gate dielectric 、 Doping 、 Doping profile 、 Materials science
摘要: Graded dielectric layers and methods of fabricating such provide dielectrics in a variety electronic structures for use wide range devices systems. In an embodiment, layer is graded with respect to doping profile across the layer. crystalline structure formed by atomic deposition incorporating sequencing techniques generate doped material.
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