Grating-based evanescent field molecular sensor using a thin silicon waveguide layer
作者： Trevor Mischki , Jean Lapointe , Adam Densmore , Jens Schmid , Dan-Xia Xu
DOI:
关键词: Waveguide (electromagnetism) 、 Silicon on insulator 、 Dual-polarization interferometry 、 Beam (structure) 、 Field strength 、 Wafer 、 Materials science 、 Optics 、 Single-mode optical fiber 、 Grating
摘要: A technique for high sensitivity evanescent field molecular sensing employs a detection scheme that simultaneously couples polarized beam to single mode of waveguide, and the out waveguide specularly reflect by same grating. Strong interaction with (preferably TM) is provided using silicon on insulator (SOI) wafer having thickness chosen between 10-400 nm so majority strength spans field. Well known, robust techniques producing grating are provided. Interrogation from backside SOI taught.
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