作者: Nobuhiro Kobayashi , Sho Katsura , Toshiki Sato , Jun Suzuki
DOI:
关键词: High productivity 、 Layer (electronics) 、 Oxide 、 Warm water 、 Substrate (electronics) 、 Composite material 、 Materials science 、 Reflectivity 、 Alloy 、 Alkali metal
摘要: A reflective film laminate is provided with high productivity and at low cost in which a protective minimized pinholes to improve the alkali resistance warm water of including pure Al or an Al-based alloy so that reflectivity reduction resulting from elution oxidization alkaline environment less likely occur. The present invention includes, over substrate, as first layer, oxide metal containing one more elements selected group consisting Zr, Cr, Y, Nb, Hf, Ta, W, Ti, Si, Mo second layer layer. thickness 0.1 10 nm.