Surface self-diffusion of Si on Si(001)
作者： Y.-W. Mo , J. Kleiner , M.B. Webb , M.G. Lagally
DOI: 10.1016/0039-6028(92)90968-C
关键词: Activation energy 、 Effective diffusion coefficient 、 Chemistry 、 Analytical chemistry 、 Anisotropy 、 Diffusion (business) 、 Molecular physics 、 Surface diffusion 、 Substrate (electronics) 、 Self-diffusion 、 Scanning tunneling microscope
摘要: … 6b, the two types of terraces reach the step-flow growth mode at different temperature~ with the limiting rate produced by the lower diffusion coefficient. The Si(001) surface solves this …
harvard.edu
elsevier.com
sci-hub.se 参考文章(35)
John McDonald Blakely, Surface physics of materials Elsevier Science. ,(1975)
S. Stoyanov, A direction of easy diffusion on the (001) face of Ge, Si and III-V semiconductor crystals — How to verify its existence? Journal of Crystal Growth. ,vol. 94, pp. 751- 756 ,(1989) , 10.1016/0022-0248(89)90099-7
F. K. Men, W. E. Packard, M. B. Webb, Si(100) surface under an externally applied stress. Physical Review Letters. ,vol. 61, pp. 2469- 2471 ,(1988) , 10.1103/PHYSREVLETT.61.2469
J A Venables, G D T Spiller, M Hanbucken, Nucleation and growth of thin films Reports on Progress in Physics. ,vol. 47, pp. 399- 459 ,(1984) , 10.1088/0034-4885/47/4/002
Richard B. Hall, Surface diffusion measured by laser-induced desorption: Monte Carlo simulation of effects of surface defects on diffusion Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 5, pp. 1470- 1476 ,(1987) , 10.1116/1.583658
G. L. Kellogg, Peter J. Feibelman, Surface self-diffusion on Pt(001) by an atomic exchange mechanism. Physical Review Letters. ,vol. 64, pp. 3143- 3146 ,(1990) , 10.1103/PHYSREVLETT.64.3143
Y.-W. Mo, B. Swartzentruber, R. Kariotis, M. Webb, M. Lagally, Growth and equilibrium structures in the epitaxy of Si on Si(001). Physical Review Letters. ,vol. 63, pp. 2393- 2396 ,(1989) , 10.1103/PHYSREVLETT.63.2393
R. Butz, H. Wagner, Diffusion of oxygen on tungsten (110) Surface Science. ,vol. 63, pp. 448- 459 ,(1977) , 10.1016/0039-6028(77)90358-2
T. Irisawa, Y. Arima, T. Kuroda, Periodic changes in the structure of a surface growing under MBE conditions Journal of Crystal Growth. ,vol. 99, pp. 491- 495 ,(1990) , 10.1016/0022-0248(90)90569-7
J.J. De Miguel, A. Sánchez, A. Cebollada, J.M. Gallego, J. Ferrón, S. Ferrer, The surface morphology of a growing crystal studied by thermal energy atom scattering (TEAS) Surface Science. ,vol. 189, pp. 1062- 1068 ,(1987) , 10.1016/S0039-6028(87)80550-2