Phase evolution, morphological, optical and electrical properties of femtosecond pulsed laser deposited TiO2 thin films.

作者: E. Kumi-Barimah , R. Penhale-Jones , A. Salimian , H. Upadhyaya , A. Hasnath

DOI: 10.1038/S41598-020-67367-X

关键词: Raman spectroscopyScanning electron microscopeTransmission electron microscopyRutileIndium tin oxideThin filmSubstrate (electronics)OptoelectronicsAnataseMaterials science

摘要: In this paper, we report anatase and rutile titanium oxide (TiO2) nanoparticulate thin films fabricated on silica Indium Tin Oxide (ITO) substrates using femtosecond pulsed laser deposition (fs-PLD). Depositions were carried-out at substrate temperatures of 25 °C, 400 °C 600 °C from phase target materials. Effect temperature the surface morphology, microstructural, optical, electrical properties these systematically investigated by various range measurements such as scanning electron microscopy, (SEM), transmission microscopy (TEM), X-ray diffraction (XRD), Raman spectroscopy, Ultraviolet–visible-near infrared (UV–Vis–NIR) Hall measurements. It is observed that TiO2 are predominated with nanoparticulates diameter less 35 nm, which constitute about ~ 70%; while optical bandgaps resistivity decrease increasing temperature. A mixed-phase (anatase/rutile) film was produced a when samples The results study indicate structural crystallinity, can be controlled varying fs-PLD process parameters to prepare films, suitable for applications in photovoltaics, solar cells, photo-catalysis.

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