Theoretical and experimental investigation of continuous-wave laser scribing on metal thin film: effect of power.
作者： Amir Hossein Shahbazi , Ata Koohian , Khosro Madanipour , Mohammad Azadeh
DOI: 10.1364/AO.57.009988
关键词: Quality (physics) 、 Laser 、 Materials science 、 Optics 、 Thin film 、 Beam (structure) 、 Laser diode 、 Fluence 、 Continuous wave 、 Ablation
摘要: In this paper, the scribing of metal thin film using a continuous-wave laser is investigated theoretically and experimentally. We propose reversible relation between incident fluence ablation width. Microscopic analysis results compared to theoretical expectations. Scribing has been done by focusing 450 nm diode beam on 100 nm chromium film. Beam power scanning speed are varied in domains 0.02-1.0 W 0.05-5 mm/s, respectively. The microscopic images show that average width varies slightly increasing speed, which was anticipated theory. Moreover if increases, quality reduced significantly not compensated power. According sample, method could be good substitute for pulsed-laser many applications such as making solar cells.
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