Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications
作者： Isolde Simon , Michael Arndt
DOI: 10.1016/S0924-4247(01)00825-1
关键词: Membrane 、 Platinum 、 Thermal conductivity 、 Detection limit 、 Hydrogen sensor 、 Chemistry 、 Analytical chemistry 、 Optoelectronics 、 Surface micromachining 、 Hydrogen 、 Thermal
摘要: Abstract This work describes the design and characterization of a micromachined thermal conductivity sensor for detection hydrogen in automotive fuel cell systems. Thermal gas-sensing properties are investigated via simulations experiments. The manufactured sensors consist thin dielectric membrane as carrier structure platinum heater temperature sensor. Membrane size were varied to examine their influence on sensitivity, power consumption response. Based element with 1.5 mm ×1.5 mm prototype limit 0.2% air was achieved.
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