Rapid thermal firing IR conveyor furnace having high intensity heating section

摘要: Isolation IR heat lamp module and method of firing multi-zone furnaces for solar cell processing comprising lamps disposed in individual parallel channels a reflector/insulator body to provide cooling air channel surrounding each tube; the are covered with IR-transmissive plate material isolate from adjacent process zone. Cooling is exhausted recycled upstream energy conservation. Lamp spacing can be varied power individually controlled infinite control temperature profile heating For spike zone, combination downstream quench annealing zones, steep curves very short dwell (sharp) peak profiles permit faster throughput due operation at essentially 100 % rated capacity, 2X or greater rate without compromising life, while producing cells improved output efficiency.