Review—Nanopillar Structure in the Direction of Optical Biosensor On-Chip Integration

作者: Suyatman , Hermawan Kresno Dipojono , Brian Yuliarto , Ni Luh Wulan Septiani , Arfat Pradana

DOI: 10.1149/1945-7111/ABFB3A

关键词: Optical biosensorOptoelectronicsMaterials scienceNanopillar

摘要:

参考文章(131)
B Dev Choudhury, R Casquel, María José Bañuls, FJ Sanza, MF Laguna, M Holgado, Rosa Puchades, A Maquieira, CA Barrios, Srinivasan Anand, None, Silicon nanopillar arrays with SiO2 overlayer for biosensing application Optical Materials Express. ,vol. 4, pp. 1345- 1354 ,(2014) , 10.1364/OME.4.001345
Zhenxing Li, Thang Duy Dao, Tadaaki Nagao, Motoki Terano, Masahiko Yoshino, Fabrication of plasmonic nanopillar arrays based on nanoforming Microelectronic Engineering. ,vol. 139, pp. 7- 12 ,(2015) , 10.1016/J.MEE.2015.04.086
Arfat Pradana, Christian Kluge, Martina Gerken, Tailoring the refractive index of nanoimprint resist by blending with TiO_2 nanoparticles Optical Materials Express. ,vol. 4, pp. 329- 337 ,(2014) , 10.1364/OME.4.000329
C.-W. Kuo, J.-Y. Shiu, Y.-H. Cho, P. Chen, Fabrication of Large‐Area Periodic Nanopillar Arrays for Nanoimprint Lithography Using Polymer Colloid Masks Advanced Materials. ,vol. 15, pp. 1065- 1068 ,(2003) , 10.1002/ADMA.200304824
Zhang Yang, Zhang Renping, Han Weihua, Liu Jian, Yang Xiang, Wang Ying, Li Chian Chiu, Yang Fuhua, Reduction of proximity effect in fabricating nanometer-spaced nanopillars by two-step exposure Journal of Semiconductors. ,vol. 30, pp. 116001- ,(2009) , 10.1088/1674-4926/30/11/116001
Venkataramani Anandan, Yeswanth L Rao, Guigen Zhang, Nanopillar array structures for enhancing biosensing performance. International Journal of Nanomedicine. ,vol. 1, pp. 73- 79 ,(2006) , 10.2147/NANO.2006.1.1.73
Hassan Rashidi, Masahiko Yoshino, Fabrication of sub-20 nm nanostructures by combination of nano plastic forming and etching (NPFE) Journal of Micromechanics and Microengineering. ,vol. 20, pp. 095003- ,(2010) , 10.1088/0960-1317/20/9/095003
Daniela Threm, Yousef Nazirizadeh, Martina Gerken, Photonic crystal biosensors towards on-chip integration. Journal of Biophotonics. ,vol. 5, pp. 601- 616 ,(2012) , 10.1002/JBIO.201200039
Huigao Duan, Richard G. Hobbs, Eric A. Stach, Karl K. Berggren, Vitor R. Manfrinato, Lihua Zhang, Dong Su, Resolution Limits of Electron-Beam Lithography toward the Atomic Scale Nano Letters. ,vol. 13, pp. 1555- 1558 ,(2013) , 10.1021/NL304715P
M. Christiane Brahimi-Horn, Jacques Pouysségur, Oxygen, a source of life and stress FEBS Letters. ,vol. 581, pp. 3582- 3591 ,(2007) , 10.1016/J.FEBSLET.2007.06.018