Mechanical seal device and processing apparatus

摘要: A mechanical seal device in which, between a processing equipment which performs under sterile condition and rotary shaft used with its one end inserted the from an atmosphere side, parts are disposed outside at least two places along length direction of side toward seals shaft, when inside sterilized, atmosphere-side part is also easily surely sterilized similarly to other part. An airtight area provided on so that communicating kept all circumferential sterilizing gas supplied sealing fluid area, main body device, order sterilize retained area.