Profilometer stylus assembly insensitive to vibration

摘要: A stylus profilometer having a counterbalanced with motion transducer using vane (41) moving between parallel, spaced-apart, conductive plates (35 and 37) which damp the of by means trapped air. The forms an electrode so that combination is pair capacitors in balanced bridge arrangement. Motion causes unbalance indicative extent motion. lever arm (59) associated has tip (57) influenced magnetic field biases or controls force on surface to be measured. entire assembly very low moment inertia reduce effects vibration thereby increase resolution device damage substrate.