作者: Roman C. Gutierrez , Robert J. Calvet , Ankur Jain , Guiqin Wang , Xiaolei Liu
DOI:
关键词: Electronic engineering 、 Actuator 、 Fixed frame 、 Frame (networking) 、 Planar 、 Electrically conductive 、 Acoustics 、 Position (vector) 、 Physics
摘要: A method for making an actuator includes forming, e.g., using photolithography techniques, a substantially planar device of electrically conductive material, semiconductor, to include outer frame, fixed frame coupled the rotational movement relative thereto, moveable and incorporating plurality interdigitated teeth, portion which is attached moving frame. The then rotated deployed position such that teeth disposed at selected angle position.