Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation
作者： Adam Bouchaala , Ali H Nayfeh , Nizar Jaber , Mohammad I Younis , None
DOI: 10.1088/0960-1317/26/10/105009
关键词: Electrode 、 Normal mode 、 Microelectromechanical systems 、 Optics 、 Added mass 、 Polyimide 、 Polymer 、 Microbeam 、 Analytical chemistry 、 Nonlinear system 、 Chemistry
摘要: We present a method to determine accurately the position and mass of an entity attached surface electrostatically actuated clamped–clamped microbeam implemented as sensor. In theoretical investigation, is modeled nonlinear Euler–Bernoulli beam perturbation technique used develop closed-form expression for frequency shift due added at specific location on surface. The experimental investigation was conducted made Polyimide with special lower electrode excite both first second modes vibration. Using ink-jet printer, we deposited droplets polymers defined measured shifts in its resonance frequencies. predictions match well measurements.
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