Superlubricity of CNx-coatings in Nitrogen Gas Atmosphere

摘要: Publisher Summary This chapter introduces CNx-coatings produced on Si-wafers or Si3N4 disks by having the deposition of carbon from a solid target 99.999% purity together with mixing nitrogen ions irradiated simultaneously an ion beam gun. The for coating Si-wafer is sputtered argon ion, and disk it evaporated heating electron beam. hardness about 30 GPa in indentation depth 10–50 nm. It experimentally confirmed that sliding CNx-coating against itself gas atmosphere gives friction coefficient 0.005–0.01 range, wear rate below 10−7 mm3/Nm. N2 effect reducing further enhanced exposing running-in process to O2 humid air. analysis tribolayer formed scar Raman shows existence graphite-like structure. Therefore, key understanding mechanism low seems exist interaction between structure surrounding nitrogen.