On the Mechanics and Physics in the Nano-Indentation of Silicon Monocrystals.

作者: Liang-Chi ZHANG , Hiroaki TANAKA

DOI: 10.1299/JSMEA.42.546

关键词: Monocrystalline siliconSingle crystalMechanicsSiliconDislocationMaterials scienceIndentationShear stressNanoindentationContact area

摘要: This paper aims to investigate some fundamental problems of mechanics and physics in the nano-indentation silicon monocrystals with aid molecular dynamics analysis. The study showed that inelastic deformation is solely caused by amorphous phase transformation. Dislocations do not appear purely elastic exists only an extremely narrow regime. onset can be predicted a criterion considering either octahedral or maximum shear stress. Due transformation, conatct area between indenter specimen varies very complex manner. offers new theory for monocrystalline silicon.

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