作者: Liang-Chi ZHANG , Hiroaki TANAKA
DOI: 10.1299/JSMEA.42.546
关键词: Monocrystalline silicon 、 Single crystal 、 Mechanics 、 Silicon 、 Dislocation 、 Materials science 、 Indentation 、 Shear stress 、 Nanoindentation 、 Contact area
摘要: This paper aims to investigate some fundamental problems of mechanics and physics in the nano-indentation silicon monocrystals with aid molecular dynamics analysis. The study showed that inelastic deformation is solely caused by amorphous phase transformation. Dislocations do not appear purely elastic exists only an extremely narrow regime. onset can be predicted a criterion considering either octahedral or maximum shear stress. Due transformation, conatct area between indenter specimen varies very complex manner. offers new theory for monocrystalline silicon.