Design and characterization of miniature piezoelectric generators with low resonant frequency

摘要: Abstract In this study, both materials selection and device configuration design were considered for developing miniature piezoelectric generators with low resonant frequency. Instead of single crystal Si, stainless steel (SUS) was chosen as the substrate AlN thin films owing to its higher fracture toughness, which made it possible that millimeter-scale had frequency less than 100 Hz. The including aspect ratio (the length cantilever width cantilever) thickness layer film layer) analyzed optimizing transverse electromechanical coupling coefficient generators. Using deposited on steel, fabricated their vibration energy harvesting performance characterized. Output power devices are, respectively, 5.130 μW 69.8 Hz when they vibrated at 1 g acceleration connected 0.7 MΩ electric loading.