Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis
作者： César Daniel Rivera-Tello , Francisco Javier Flores-Ruiz , M Flores , O Jimenez , I Farías
DOI: 10.1007/S42823-020-00148-8
关键词: Chemical vapor deposition 、 Raman spectroscopy 、 Composite material 、 Methane 、 Tribology 、 Plasma-enhanced chemical vapor deposition 、 Materials science 、 Swelling 、 Coating 、 Deposition (phase transition)
摘要: This paper presents a Raman spectroscopy study of the influence methane flow on micro-tribological behavior diamond-like carbon coatings deposited with an industrial plasma-enhanced chemical vapor deposition system. Results have shown direct relationship between and thickness coatings. The analysis spectra parameters allowed establishing H content flow, disorder level estimation sp3 fraction micro-tribology tests showed strong dependence wear resistance hardness parameters. coating at 72-sccm presented 1.7 µm 0.33. gave rise to 24 GPa excellent 3.3 × 10–6 mm3 N−1 mm−1 for this DLC coating. Wear swelling in profiles coating, which was associated occurrence re-hybridization process.
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