CORRIGENDUM: Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators

摘要: Micromechanical resonators are promising replacements for quartz crystals timing and frequency references owing to potential compactness, integrability with CMOS fabrication processes, low cost, power consumption. To be used in high performance reference application, should obtain a quality factor. The limit of the factor achieved by resonator is set material properties, geometry operating condition. Some recent properly designed exploiting bulk-acoustic resonance have been demonstrated operate close quantum mechanical product (Q-f). Here, we describe physics that gives rise Q-f product, explain design strategies minimizing other dissipation sources, present new results from several different approach limit.