Influence of molecular structure on thermal behavior in vacuum packaged MEMS/NEMS using DSMC
作者： Ehsan Roohi , Ehsan Yazdanpanah Moghadam , Javad Abolfazli Esfahani , None
DOI:
关键词: Nanoelectromechanical systems 、 Mechanics 、 Knudsen number 、 Nano- 、 Classical mechanics 、 Materials science 、 Thermal 、 Direct simulation Monte Carlo 、 Heat transfer 、 Boundary value problem 、 Heat flux
摘要: In the present study, we investigate characteristics of micro/nano thermal cavity in rarefied flow regime using direct simulation Monte Carlo (DSMC) method. We use a recently developed iterative technique to impose desired wall heat flux boundary condition DSMC solver. Hydrothermal and transfer behaviors are studied over walls inside domain wide range Knudsen number slip transition regimes. Finally, consider effects molecular structural parameters on hydrodynamics flows.
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