Shape memory microvalves based on thin films or rolled sheets
作者： M Kohl , D Dittmann , E Quandt , B Winzek , S Miyazaki
DOI: 10.1016/S0921-5093(99)00416-5
关键词: Shape-memory alloy 、 Laser cutting 、 Bending 、 Sputter deposition 、 Composite material 、 Tension (physics) 、 Thin film 、 Fabrication 、 Engineering drawing 、 Bar (music) 、 Materials science
摘要: Abstract This paper reports on recent developments of gas microvalves, which are actuated by microfabricated shape memory alloy (SMA) thin films or sheets with stress-optimised shapes. TiNi, TiNiCu and TiNiPd 10 μm thickness have been fabricated sputter deposition. TiNi 30–100 made hot-forging cold-rolling. The main fabrication technologies the valves laser cutting electrolytic photoetching subsequent hybrid integration. By variation chemical composition films, valve operation temperature was adjusted between 30 120°C. film devices operated in tension mode allowing control maximum pressure differences 3000 hPa (3 bar). corresponding flow is about 360 Standard ccm. power for microvalves 110 mW, 220 mW. SMA sheet microdevices bending mode, allows large strokes thus flows.
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