Linear and nonlinear equivalent circuit modeling of CMUTs
作者： A. Lohfink , P.-C. Eccardt
DOI: 10.1109/TUFFC.2005.1563260
关键词: Electrical impedance 、 Piston 、 Equivalent circuit 、 Capacitive sensing 、 Linear circuit 、 Capacitive micromachined ultrasonic transducers 、 Engineering 、 Ultrasonic sensor 、 Acoustics 、 Finite element method
摘要: Using piston radiator and plate capacitance theory capacitive micromachined ultrasound transducers (CMUT) membrane cells can be described by one-dimensional (1-D) model parameters. This paper describes in detail a new method, which derives a 1-D model for CMUT arrays from finite-element methods (FEM) simulations. A few static and harmonic FEM analyses of a single CMUT membrane cell are sufficient to derive the mechanical and electrical parameters of an equivalent piston as the moving part of the cell area. For an array …
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