Development of a high performance integrated sensor chip with a multi-walled carbon nanotube assisted sensing array
作者： Pi Kai Chuang , Li Chun Wang , Cheng Tzu Kuo , None
DOI: 10.1016/J.TSF.2012.09.024
关键词: Polymer 、 Wafer 、 Composite number 、 Casting 、 Nanotechnology 、 Materials science 、 Overlayer 、 Stack (abstract data type) 、 Carbon nanotube 、 Chip
摘要: Abstract For room temperature toxic gas sensing, a system chip with MWCNT (multi-walled carbon nanotube)-assisted array of 30 sensors (two for each 15 sensor types) was developed. Gases tested include four simulants chemical warfare agents: dichloromethane, acetonitrile, 2-chloroethyl ethyl sulfide, and dimethyl-methyl phosphonate (DMMP). By selecting different functional polymer materials, composite composed sensing stacks (polymer/MWCNTs/Si(001), wafer) fabricated by solution droplet casting method to simplify the process. The principle is basically measure resistivity change device upon contact target gas. One advantages stack having overlayer above layer being able protect from direct interaction improve life sensitivity. results indicate that fingerprint pattern radar plot can be determined testing run, specificity achieved through 3-D principal component analysis plots. also show linear relationship between resistance response concentration clearly evident these gases. extrapolation careful process monitoring, sensitivity much lower than 43 ppm DMMP vapor likely. mechanisms are discussed in text.
nctu.edu.tw参考文章(21)
Nathan S. Lewis, Margaret A. Ryan, Low power, lightweight vapor sensing using arrays of conducting polymer composite chemically-sensitive resistors. Enantiomer. ,vol. 6, pp. 159- 170 ,(2001)
Cees Dekker, Carbon nanotubes as molecular quantum wires Physics Today. ,vol. 52, pp. 22- 28 ,(1999) , 10.1063/1.882658
Yong Shin Kim, Seung-Chul Ha, Yoonseok Yang, Young Jun Kim, Seong Mok Cho, Haesik Yang, Youn Tae Kim, Portable electronic nose system based on the carbon black–polymer composite sensor array Sensors and Actuators B-chemical. ,vol. 108, pp. 285- 291 ,(2005) , 10.1016/J.SNB.2004.11.067
Geoffrey R. Hutchison, Mark A. Ratner, Tobin J. Marks, Hopping transport in conductive heterocyclic oligomers: reorganization energies and substituent effects. Journal of the American Chemical Society. ,vol. 127, pp. 2339- 2350 ,(2005) , 10.1021/JA0461421
Wolfgang Göpel, Klaus Dieter Schierbaum, SnO2 sensors: current status and future prospects Sensors and Actuators B: Chemical. ,vol. 26, pp. 1- 12 ,(1995) , 10.1016/0925-4005(94)01546-T
Alexey A. Tomchenko, Gregory P. Harmer, Brent T. Marquis, Detection of chemical warfare agents using nanostructured metal oxide sensors Sensors and Actuators B-chemical. ,vol. 108, pp. 41- 55 ,(2005) , 10.1016/J.SNB.2004.11.059
ES Snow, FK Perkins, EJ Houser, SC Badescu, TL Reinecke, Chemical Detection with a Single-Walled Carbon Nanotube Capacitor Science. ,vol. 307, pp. 1942- 1945 ,(2005) , 10.1126/SCIENCE.1109128
H Meixner, J Gerblinger, U Lampe, M Fleischer, Thin-film gas sensors based on semiconducting metal oxides Sensors and Actuators B: Chemical. ,vol. 23, pp. 119- 125 ,(1995) , 10.1016/0925-4005(94)01266-K
B. J. Doleman, E. J. Severin, N. S. Lewis, Trends in odor intensity for human and electronic noses: Relative roles of odorant vapor pressure vs. molecularly specific odorant binding Proceedings of the National Academy of Sciences of the United States of America. ,vol. 95, pp. 5442- 5447 ,(1998) , 10.1073/PNAS.95.10.5442
Julian W. Gardner, Philip N. Bartlett, Application of conducting polymer technology in microsystems Sensors and Actuators A-physical. ,vol. 51, pp. 57- 66 ,(1995) , 10.1016/0924-4247(95)85004-X