Laser machining system and method
作者： Steven Robert Hayashi , Xi Zhang , Hongqiang Chen
DOI:
关键词: Beam tilt 、 USable 、 Machining 、 Optics 、 Lens (optics) 、 Field of view 、 Optical axis 、 Focal length 、 Laser 、 Materials science
摘要: A laser machining method 200 includes directing 210, from an F-theta lens having a long focal length of greater than about 250 millimeters, beam at non-perpendicular tilt angle optical axis the top-hat profile and narrow divergence between 1 degree 3 degrees towards workpiece on stage movable in least X-direction Y-direction, engaging 220 directed with disposed usable field view, moving 230 relative to each other, removing 240 portions define machined surface.
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