作者: C. Jeynes , M.J. Bailey , N.J. Bright , M.E. Christopher , G.W. Grime
DOI: 10.1016/J.NIMB.2011.09.020
关键词: Range (particle radiation) 、 Resolution (electron density) 、 Uncertainty budget 、 Elemental composition 、 Photon 、 Computational physics 、 Atomic physics 、 Ion beam analysis 、 High resolution 、 Chemistry
摘要: The suite of techniques which are available with the small accelerators used for MeV ion beam analysis (IBA) range from broad beams, microbeams or external beams using various particle and photon spectrometries (including RBS, EBS, ERD, STIM, PIXE, PIGE, NRA their variants), to tomography secondary like MeV-SIMS. These can potentially yield almost everything there is know about 3-D elemental composition types samples that have always been hard analyse, given sensitivity spacial resolution used. Molecular chemical information in principle with, respectively, MeV-SIMS high PIXE. However, these separately give only partial – secret “Total IBA” find synergies between simultaneously efficiently extra information. We here review how far be considered already a reality, what further needs done realise its full potential.