作者: Bridget Rogers , William Hofmeister , David Gustafson
DOI:
关键词: Optoelectronics 、 Enclosure 、 Nanotechnology 、 Electromagnetic field 、 Diode 、 Fabrication 、 Tube (fluid conveyance) 、 Ceramic 、 Substrate (electronics) 、 Materials science 、 Vacuum chamber
摘要: A system and method for directing metal or ceramic particles toward a substrate (18) in vacuum chamber includes powder hopper (11), an enclosure (12) containing multiple differentially pumped chambers (19), charging lamp (13), tube (14), heating diodes 15, electromagnetic field generating device (EFGD) (17). The (11) holds particles, the (19) propel through (14) towards positioned close to tube, (13) charges (15) are used heat EFGD (17) controls direction of propelled out tube.