System and method for direct fabrication of micro/macro scale objects in a vacuum using electromagnetic steering

作者: Bridget Rogers , William Hofmeister , David Gustafson

DOI:

关键词: OptoelectronicsEnclosureNanotechnologyElectromagnetic fieldDiodeFabricationTube (fluid conveyance)CeramicSubstrate (electronics)Materials scienceVacuum chamber

摘要: A system and method for directing metal or ceramic particles toward a substrate (18) in vacuum chamber includes powder hopper (11), an enclosure (12) containing multiple differentially pumped chambers (19), charging lamp (13), tube (14), heating diodes 15, electromagnetic field generating device (EFGD) (17). The (11) holds particles, the (19) propel through (14) towards positioned close to tube, (13) charges (15) are used heat EFGD (17) controls direction of propelled out tube.

参考文章(6)
Xiangli Chen, Donald Ernest Woodmansee, Laser-assisted material spray processing ,(1997)
Kwang-Leong Choy, Wei Bai, Film or coating deposition on a substrate ,(1998)
David S. Ensor, Anthony C. Clayton, Ravindran Periasamy, Robert P. Donovan, Apparatus and method for uniformly coating a substrate in an evacuable chamber RTI International. P.O. Box 12194, Research Triangle Park, NC 27709-2194. Tel: 919-541-6000; e-mail: publications@rit.org; Web site: http://www.rti.org. ,(1991)
Eric J. Whitney, Vanon D. Pratt, Wilbur D. Scheidt, Transverse flow laser spray nozzle ,(1989)