In Situ Characterization of Ferroelectric HfO2 During Rapid Thermal Annealing
作者： Valerio Adinolfi , Michael F. Toney , Martin E. McBriarty , Vijay Kris Narasimhan , Karl A. Littau
关键词: Chemical engineering 、 Characterization (materials science) 、 Rapid thermal annealing 、 Ferroelectricity 、 In situ 、 Materials science 、 Hafnium oxide
摘要: … The high kinetic barrier blocking the conversion to the monoclinic phase suggests that the ferroelectricity in pure HfO 2 films can be increased by using a fast ramp rate and reducing the …
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