ZnO thin films produced by magnetron sputtering
作者： Wei Gao , Zhengwei Li
DOI: 10.1016/J.CERAMINT.2003.12.197
关键词: Mineralogy 、 Materials science 、 Partial pressure 、 Thin film 、 Doping 、 Optoelectronics 、 Sputter deposition 、 Cavity magnetron 、 Microstructure 、 Photoluminescence 、 Direct current
摘要: … deposition, vacuum arc deposition, and magnetron sputtering [6], [7], [8], [9], [10], [11], [12]. In the present project, we used magnetron sputtering deposition to prepare ZnO thin films. The …
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