Fabrication and characterization of high efficiency multilayer-coated blazed gratings for EUV range

摘要: Author(s): Voronov, Dmytro L; Cambie, Rossana; Ahn, Minseung; Anderson, Erik H; Chang, Chih-Hao; Gullikson, Eric M; Heilmann, Ralf K; Salmassi, Farhad; Schattenburg, Mark Yashchuk, Valeriy V; Warwick, Tony; Goray, Leonid I; Padmore, Howard A | Abstract: Multilayer coated blazed gratings with high groove density are the most promising candidate for resolution EUV and soft x-ray spectroscopy. They combine ability of to concentrate almost all diffraction energy in a desired order reflectance multilayers. The however have be superior quality realize their potential. Thus, grating fabrication process should provide perfect triangle profile extremely smooth surface facets. Here we report on recent progress characterization designed applications. having from 5000 10000 lines/mm were fabricated scanning beam interference lithography or electron followed by wet anisotropic etch silicon wafers multilayer deposition. morphology was characterized AFM SEM, evolution structure stack course deposition onto corrugated studied TEM (Fig. 1). efficiency measurements performed at ALS line 6.3.2. Mo/Si composed 30 bi-layers demonstrated more than 37percent 3rd 2). An impact imperfections perturbations also investigated via simulations PCGrate 6.1 code. results study show good prospects extend technology towards x-rays.