Template Controlled Growth
作者： Sven Clemens , Theodor Schneller
DOI: 10.1007/978-3-211-99311-8_21
关键词: Microscopy 、 Silicon 、 Nanotechnology 、 Piezoresponse force microscopy 、 Lithography 、 Nucleation 、 Amorphous solid 、 Ferroelectricity 、 Chemical-mechanical planarization 、 Materials science
摘要: By means of ferroelectric nanograins various template based approaches to a registered assembly functional materials is reviewed. At first the principles seeds and seedlayers for orientation selection are discussed. Then generation artificial seed pattern by number top-down bottom-up methods as well combination them As such (1) e-beam lithography, (2) lithography combined with lift off processing, (3) soft infiltration, (4) self-assembly approach on diblock-copolymer micelles gold hard masks, (5) FIB generate defined nucleation sites platinized silicon within an amorphous TiO2 layer detailed. Functional ferroelectrics, mainly obtained subsequent CSD were characterized surface probe microscopy (SPM) atomic force (AFM) piezoelectric (PFM). Embedding concepts grown nanograins, which enable maintain properties, complement controlled growth regard possible integration.
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