作者: E. Teng , W. Goh , A. Eltouhky
DOI: 10.1109/20.538827
关键词: Amorphous solid 、 Laser power scaling 、 Pulse duration 、 Laser 、 Glass-ceramic 、 Texture (crystalline) 、 Crystallite 、 Optics 、 Stiction 、 Materials science
摘要: A sealed, compact, and low power CO/sub 2/ pulsed laser is used to melt a focused microscopic area on an alternative glass ceramic substrate. By precisely controlling the power, pulse duration, rate, disk movement, well-refined array of bumps can be produced The bump formation substrate shows positive-extending volume without any negative-extending volume. TEM electron diffraction phase change from polycrystalline amorphous in melted area. In addition stress release, domed could doe expansion newly formed phase. CSS test results show that supersmooth stiction reduced by one order magnitude applying zone texture. transition width between texture data zones also made as small few milli-inches increase recording