Electrochemical etching technique for tungsten electrodes with controllable profiles for micro-electrical discharge machining

摘要: Lately, the development of micro/nano-scale devices in optics, displays, communications, electronics, and fuel-cell industries has given rise to advent various micro-machining techniques for fabricating microstructures. Moreover, demand fabrication complicated microstructures increases constantly. Micro-EDM is one many methods that been used successfully fabricate microstructures, hence need high-quality micro-electrode tools also growing. There are several well-known such as reverse electrical discharge machining wire grinding. However, these limited by low aspect ratio lengthy time. In this paper, we propose a novel micro electrode process with low-cost, easy setup, quick flexible implementation compared commonly methods. Our approach based on electrochemical etching technique. technique, tungsten etched until obtain desired profile. Several experiments were carried out analyze parameters evaluate accuracy our proposed method. The results detailed role every key parameter applied voltage, ring diameter, oscillation speed, etc... And demonstrated method can be 16-minute timeframe an error less than 7%.