Unidirectional endotaxial cobalt di-silicide nanowires on Si(110) substrates

作者: J C Mahato , Debolina Das , Nasrin Banu , Biswarup Satpati , B N Dev

DOI: 10.1088/1361-6528/AA7F31

关键词: Transmission electron microscopyNanodotNanowireSiliconScanning tunneling microscopeSilicideCobaltOptoelectronicsMaterials scienceSubstrate (electronics)Nanotechnology

摘要: Self-organized growth of well-ordered endotaxial silicide nanowires (NWs) on clean Si(110) surfaces has been investigated by in situ scanning tunneling microscopy (STM) and transmission electron (TEM). Co deposition reconstructed at ~600 °C produces unidirectional CoSi2 NWs reaction cobalt with the hot silicon substrate. STM investigations reveal four major types distinct NWs, all growing along [-110] in-plane direction except one type [-113] direction. There are also some nanodots. The cross-sectional TEM measurements show that two types—flat-top ridged. grow not only substrate but into flat top same crystallographic orientation as Si buried interfaces between A-type. In ridged different orientations B-type. general wider deeper

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