Developments of Laser Fabrication Methods for Lab-on-a-Chip Microfluidic Multisensing Devices

摘要: There is strong interest in using technologies that will provide for higher dimensional accuracy and novel designs within lab-on-a-chip microfluidic chemical biological species-sensing devices. Laser-processing particular can be used to fabricate such Over the last 10 years, various laser systems have been applied optimized processing of glass polymer materials. As well as conventional types materials, more recently use picosecond femtosecond a ‘cold type’ ablation where continuous internal microchannel performed due reduced associated heat-affected zone. A short review on different fabrication methods employed production devices thus presented here. Alternative standard microfabrication common materials also briefly discussed.