rf Glow Discharge Cleaning in the DITE Tokamak
作者： J. Burt , S. J. Fielding , G. M. McCracken , G. Mezey , D. D. R. Summers†
关键词: Atmospheric pressure 、 Silicon 、 Methane 、 Analytical chemistry 、 Atomic physics 、 Hydrogen 、 Glow discharge 、 Carbon 、 Materials science 、 Impurity 、 Fusion power
摘要: An R.F. assisted glow discharge cleaning system has been used on the DITE tokamak to remove low z impurities. Rapid of was achieved without baking following a major rebuild vacuum and subsequent exposures atmospheric pressure. Discharge with both pure hydrogen 1% added methane used. However ultimate impurity level could not be reduced below that corresponding Z /sub eff/ = 2. Clean single crystal silicon samples were exposed in discharges. Analysis these by RBS showed there high deposition rates carbon, oxygen metals plus
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