Characterization of surface modifications by white light interferometry: applications in ion sputtering, laser ablation, and tribology experiments.

摘要: In materials science and engineering it is often necessary to obtain quantitative measurements of surface topography with micrometer lateral resolution. From the measured surface, 3D topographic maps can be subsequently analyzed using a variety software packages extract information that needed. this article we describe how white light interferometry, optical profilometry (OP) in general, combined generic analysis software, used for tasks. article, number applications interferometry investigation modifications mass spectrometry, wear phenomena tribology lubrication are demonstrated. We characterize products interaction semiconductors metals energetic ions (sputtering), laser irradiation (ablation), as well ex situ tribological test specimens. Specifically, will discuss: i. Aspects traditional ion sputtering-based spectrometry such sputtering rates/yields on Si Cu subsequent time-to-depth conversion. ii. Results characterization femtosecond semiconductor surface. These results important ablation where quantities evaporated material studied controlled via pulse duration energy per pulse. Thus, by determining crater geometry one define depth resolution versus experimental setup conditions. iii. Measurements roughness parameters two dimensions, occur result friction tests. Some inherent drawbacks, possible artifacts, uncertainty assessments approach discussed explained.