Piezodriven 50‐μm range stage with subnanometer resolution
作者： Fredric E. Scire , E. Clayton Teague
DOI: 10.1063/1.1135327
关键词: Optics 、 Range (particle radiation) 、 Lever 、 Microelectronics 、 Resolution (electron density) 、 Stage (hydrology) 、 Asbestos fibers 、 Piezoelectricity 、 Materials science 、 Electron microscope
摘要: A micropositioning stage has been developed for use with optical and electron microscopes in the accurate measurement of fine lines used by microelectronics industry microscopic objects such as biological cells, air pollution particles, asbestos fibers. The combines a piezoelectric driving element flexure pivoted lever arms to achieve compact, vacuum compatible device resolution 0.001 μm or less over range 50 μm.
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