Effect of hydrogen peroxide treatment on the characteristics of Pt Schottky contact on n-type ZnO

作者: Sang-Ho Kim , Han-Ki Kim , Tae-Yeon Seong

DOI: 10.1063/1.1862772

关键词: HydrogenPhotoluminescenceHydrogen peroxideSchottky diodeMaterials scienceAnalytical chemistrySchottky barrierVoltageOptoelectronicsWide-bandgap semiconductorPlatinumPhysics and Astronomy (miscellaneous)

摘要: We report on the formation of good Pt Schottky contacts Zn-terminated n-type ZnO (0001) surfaces (∼2×1017cm−3) using surface treatment with a hydrogen peroxide solution. The organic solvent-cleaned show leaky behavior high leakage current ∼−0.05A under −5V reverse bias voltage, whereas peroxide-treated very low ∼−6.5×10−8A voltage. barrier heights estimated from current-voltage and capacitance-voltage characteristics are 0.89 0.93eV, respectively. Room-temperature photoluminescence results that is fairly effective in removing deep-level defects near region. In addition, preliminary transient spectroscopy result also presented.

参考文章(27)
Hiromichi Ohta, Ken-ichi Kawamura, Masahiro Orita, Masahiro Hirano, Nobuhiko Sarukura, Hideo Hosono, None, Current injection emission from a transparent p–n junction composed of p-SrCu2O2/n-ZnO Applied Physics Letters. ,vol. 77, pp. 475- 477 ,(2000) , 10.1063/1.127015
F D Auret, S A Goodman, M Hayes, M J Legodi, H A van Laarhoven, D C Look, The influence of high energy proton bombardment on the electrical and defect properties of single-crystal ZnO Journal of Physics: Condensed Matter. ,vol. 13, pp. 8989- 8999 ,(2001) , 10.1088/0953-8984/13/40/315
S. J. Pearton, D. P. Norton, K. Ip, Y. W. Heo, T. Steiner, Recent advances in processing of ZnO Journal of Vacuum Science & Technology B. ,vol. 22, pp. 932- 948 ,(2004) , 10.1116/1.1714985
A. Rohatgi, S. K. Pang, T. K. Gupta, W. D. Straub, The deep level transient spectroscopy studies of a ZnO varistor as a function of annealing Journal of Applied Physics. ,vol. 63, pp. 5375- 5379 ,(1988) , 10.1063/1.340355
Han-Ki Kim, Sang-Heon Han, Tae-Yeon Seong, Won-Kook Choi, Low-resistance Ti/Au ohmic contacts to Al-doped ZnO layers Applied Physics Letters. ,vol. 77, pp. 1647- 1649 ,(2000) , 10.1063/1.1308527
XL Wu, GG Siu, CL Fu, HC Ong, None, Photoluminescence and cathodoluminescence studies of stoichiometric and oxygen-deficient ZnO films Applied Physics Letters. ,vol. 78, pp. 2285- 2287 ,(2001) , 10.1063/1.1361288
A. Y. Polyakov, N. B. Smirnov, E. A. Kozhukhova, V. I. Vdovin, K. Ip, D. P. Norton, S. J. Pearton, Properties of Au and Ag Schottky diodes prepared on undoped n-ZnO Journal of Vacuum Science and Technology. ,vol. 21, pp. 1603- 1608 ,(2003) , 10.1116/1.1589530
S. Liang, H. Sheng, Y. Liu, Z. Huo, Y. Lu, H. Shen, ZnO Schottky ultraviolet photodetectors Journal of Crystal Growth. ,vol. 225, pp. 110- 113 ,(2001) , 10.1016/S0022-0248(01)00830-2
K. Ip, Y. W. Heo, K. H. Baik, D. P. Norton, S. J. Pearton, S. Kim, J. R. LaRoche, F. Ren, Temperature-dependent characteristics of Pt Schottky contacts on n-type ZnO Applied Physics Letters. ,vol. 84, pp. 2835- 2837 ,(2004) , 10.1063/1.1705726
Hiromichi Ohta, Masao Kamiya, Toshio Kamiya, Masahiro Hirano, Hideo Hosono, UV-detector based on pn-heterojunction diode composed of transparent oxide semiconductors, p-NiO/n-ZnO Thin Solid Films. ,vol. 445, pp. 317- 321 ,(2003) , 10.1016/S0040-6090(03)01178-7