Detecting faults during inspection of masks, LCDs, circuit boards and semiconductor wafers
作者： Dietmar Kollhoff , Heiko Kempe , Joachim Wienecke , Karl-Heinz Franke , Michael Graef
DOI:
关键词: Liquid-crystal display 、 Artificial intelligence 、 Filter (signal processing) 、 Computer vision 、 Engineering 、 Printed circuit board 、 Optics 、 Sample (graphics) 、 Point (geometry) 、 Low-pass filter 、 Band-pass filter 、 Edge (geometry)
摘要: For the real-time detection of defects A in structured surfaces, eg for process control production processes masks, LCD'S, printed circuit boards, and semiconductor wafers, an intermediate image is formed by assigning grey values to points which are dependent on corresponding original surface, using a look-up table, analysing structure image. The table may represent probability function obtained from distribution sample areas 1 2 Edge corner structures still present be distinguished evaluating area around each point two uncorrelated characteristics, means low pass (Gaussian) filter band (spot) filter.
lens.org 参考文章(9)
Horst Polomsky, Rolf Jaeger, Verfahren zur fehlererkennung an definierten strukturen ,(1984)
Ernst Dipl Ing Neumann, Gerd Prof Dr Sc Nat Wechsung, Method and arrangement for image comparison ,(1987)
Hauke Dipl Ing Schmidt, Roland Dipl Phys Klinnert, Peter Prof Bock, Rudi Dr Kober, Verfahren zur Klassifikation von Signalen ,(1991)
Asada Kazuyoshi, Fushimi Hitoshi, Kato Masayasu, Tanaka Norio, Character recognition system - processes data to generate parameters for comparison and stores input data and comparison data in two respective memories ,(1992)
John D. Greene, Francis D. Tucker, David J. Harvey, William Bell, Robert H. Sholes, P. C. Jann, Michael E. Fein, Curt H. Chadwick, Automatic high speed optical inspection apparatus and method ,(1990)
Bel Hartmut Van, Kolzenburg Ulrich Dipl Ing, Method for finding areas in an image which exist in a reference image ,(1987)
Barker John Carrington, VERFAHREN UND ANORDNUNG ZUM VERGLEICH VON BILDERN ,(1984)
Ricker Thomas Dr Rer Nat, Schuermann Juergen Dr Ing, Testing of structures on surfaces of electrical modules - has structures scanned and tested for observance of salient factors, e.g. spacing, angles, straightness ,(1978)
William L Hrybyk, Kenneth C Ryan, Raymond A Lloyd, Verfahren zur ueberpruefung des einwandfreien zustands von bauteilen ,(1975)