Turbomolecular pump system for gas separation

作者: Wayne Thomas Mcdermott

DOI:

关键词: Turbomolecular pumpInletPort (circuit theory)Analytical chemistryGas separationStage (hydrology)Physics

摘要: Gas mixturesare separated in a device (401) comprising housing (403), turbomolecular pump assembly (407) therein having inlet and outlet ends, first chamber (409) adjacent the end an port (413) (415), second (411) (417). Several devices (801, 803, 805, 807, 809 - see Fig 8) can be connected series to provide plurality of separation stages, each respective reference number n from 1 N, inclusive The stage is (821, 861) with + 1, (853, 857) 1. any may serve as feed port. = N have product outlets (847 & 818), respectively.

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