High confinement, high yield Si3N4 waveguides for nonlinear optical applications
作者： Jörn P. Epping , Marcel Hoekman , Richard Mateman , Arne Leinse , René G. Heideman
DOI: 10.1364/OE.23.000642
关键词: Yield (engineering) 、 Optoelectronics 、 Layer (electronics) 、 Wavelength 、 Fabrication 、 Etching (microfabrication) 、 Silicon 、 Silicon nitride 、 Wafer 、 Materials science 、 Optics
摘要: In this paper we present a novel fabrication technique for silicon nitride (Si3N4) waveguides with thickness of up to 900 nm, which are suitable nonlinear optical applications. The method is based on etching trenches in thermally oxidized and filling the Si3N4. Using no stress-induced cracks Si3N4 layer were observed resulting high yield devices wafer. propagation losses obtained measured be as low 0.4 dB/cm at wavelength around 1550 nm.
osapublishing.org
harvard.edu
utwente.nl
researchgate.net 参考文章(21)
Chris G. H. Roeloffzen, Leimeng Zhuang, Caterina Taddei, Arne Leinse, René G. Heideman, Paulus W. L. van Dijk, Ruud M. Oldenbeuving, David A. I. Marpaung, Maurizio Burla, Klaus -J. Boller, Silicon nitride microwave photonic circuits Optics Express. ,vol. 21, pp. 22937- 22961 ,(2013) , 10.1364/OE.21.022937
Daryl T. Spencer, Jared F. Bauters, Martijn J. R. Heck, John E. Bowers, Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime Optica. ,vol. 1, pp. 153- 157 ,(2014) , 10.1364/OPTICA.1.000153
Joerg Pfeifle, Victor Brasch, Matthias Lauermann, Yimin Yu, Daniel Wegner, Tobias Herr, Klaus Hartinger, Philipp Schindler, Jingshi Li, David Hillerkuss, Rene Schmogrow, Claudius Weimann, Ronald Holzwarth, Wolfgang Freude, Juerg Leuthold, Tobias J. Kippenberg, Christian Koos, Coherent terabit communications with microresonator Kerr frequency combs. Nature Photonics. ,vol. 8, pp. 375- 380 ,(2014) , 10.1038/NPHOTON.2014.57
Kazuhiro Ikeda, Robert E. Saperstein, Nikola Alic, Yeshaiahu Fainman, Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides. Optics Express. ,vol. 16, pp. 12987- 12994 ,(2008) , 10.1364/OE.16.012987
Jacob S. Levy, Alexander Gondarenko, Mark A. Foster, Amy C. Turner-Foster, Alexander L. Gaeta, Michal Lipson, CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects Nature Photonics. ,vol. 4, pp. 37- 40 ,(2010) , 10.1038/NPHOTON.2009.259
Arne Leinse, Benjamin J. Eggleton, David Marpaung, Chris Roeloffzen, Blair Morrison, Ravi Pant, Marcel Hoekman, Rene Heideman, Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection Optics Express. ,vol. 21, pp. 23286- 23294 ,(2013) , 10.1364/OE.21.023286
Alexander Gondarenko, Jacob S. Levy, Michal Lipson, High confinement micron-scale silicon nitride high Q ring resonator Optics Express. ,vol. 17, pp. 11366- 11370 ,(2009) , 10.1364/OE.17.011366
Günay Yurtsever, Boris Považay, Aneesh Alex, Behrooz Zabihian, Wolfgang Drexler, Roel Baets, Photonic integrated Mach-Zehnder interferometer with an on-chip reference arm for optical coherence tomography Biomedical Optics Express. ,vol. 5, pp. 1050- 1061 ,(2014) , 10.1364/BOE.5.001050
Hong Cai, Andrew W. Poon, Optical trapping of microparticles using silicon nitride waveguide junctions and tapered-waveguide junctions on an optofluidic chip Lab on a Chip. ,vol. 12, pp. 3803- 3809 ,(2012) , 10.1039/C2LC40636E
Sebastian Romero-García, Florian Merget, Frank Zhong, Hod Finkelstein, Jeremy Witzens, Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths Optics Express. ,vol. 21, pp. 14036- 14046 ,(2013) , 10.1364/OE.21.014036