A chemical micro analysis system for measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence
作者： P. Norlin , O. Ohman , B. Ekstrom , L. Forssen
DOI: 10.1109/SENSOR.1997.613698
关键词: Fluorescence spectroscopy 、 Optical fiber 、 Temperature measurement 、 Flow measurement 、 Volumetric flow rate 、 Optoelectronics 、 Pressure measurement 、 Analytical chemistry 、 Thermistor 、 Materials science 、 Pressure sensor
摘要: A miniaturized multisensor system, intended for simultaneous measurement of six different parameters in a liquid flow, is presented. The system combines chip, micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperature, conductivity, UV-absorption fluorescence. Measurement results show that the performance can compete with conventional stand-alone sensors.
sci-hub.se 参考文章(8)
D Maier-Schneider, J Maibach, E Obermeier, D Schneider, Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing Journal of Micromechanics and Microengineering. ,vol. 5, pp. 121- 124 ,(1995) , 10.1088/0960-1317/5/2/016
E. Obermeier, P. Kopystynski, Polysilicon as a material for microsensor applications Sensors and Actuators A-physical. ,vol. 30, pp. 149- 155 ,(1992) , 10.1016/0924-4247(92)80210-T
Canqian Yang, Henrik Søeberg, Monolithic flow sensor for measuring millilitre per minute liquid flow Sensors and Actuators A-physical. ,vol. 33, pp. 143- 153 ,(1992) , 10.1016/0924-4247(92)80160-5
A. Manz, H. Lüdi, A.E. Bruno, F. Maystre, B. Krattiger, H.M. Widmer, B.H. van der Schoot, N.F. de Rooij, E. Verpoorte, A silicon flow cell for optical detection in miniaturized total chemical analysis systems Sensors and Actuators B-chemical. ,vol. 6, pp. 66- 70 ,(1992) , 10.1016/0925-4005(92)80032-S
H. Guckel, Surface micromachined pressure transducers Sensors and Actuators A: Physical. ,vol. 28, pp. 133- 146 ,(1991) , 10.1016/0924-4247(91)85021-F
P. Eriksson, J.Y. Andersson, G. Stemme, Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 6, pp. 55- 61 ,(1997) , 10.1109/84.557531
Theo S.J. Lammerink, Niels R. Tas, Miko Elwenspoek, Jan H.J. Fluitman, Micro-liquid flow sensor Sensors and Actuators A: Physical. ,vol. 37-38, pp. 45- 50 ,(1993) , 10.1016/0924-4247(93)80010-E
W. Kaplan, H. Elderstig, C. Veider, A novel fabrication method of capillary tubes on quartz for chemical analysis applications international conference on micro electro mechanical systems. pp. 63- 68 ,(1994) , 10.1109/MEMSYS.1994.555599