Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities
作者： Andreas Späth
DOI: 10.3390/MI10120834
关键词: Microscopy 、 Nano- 、 Nanotechnology 、 Materials science 、 Microscope 、 Cathode ray 、 X-ray lithography 、 Lithography 、 Deposition (phase transition) 、 Nanolithography
摘要: … small for low excitation doses due to reduction of the interaction volume [97,98]. The amount of deposited material exhibits direct linear dependence with the dwell time and the supplied …
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