Slip effect for thin liquid film on a rotating disk

作者: Masahiro Yanagisawa

DOI: 10.1063/1.338194

关键词: Hildebrand solubility parameterMathematical modelFluid dynamicsThin filmEllipsometryChromatographyMechanicsMaterials scienceSurface tensionSlip (materials science)Rotational speed

摘要: A flow for thin liquid films on rotating disks has been theoretically and experimentally studied. Liquid depletion behavior during a spin‐coating process is calculated by solving the Navier–Stokes equation, taking into account interface slip between disk. Excellent agreement seen model prediction experimental data. According to observed various parameters, half life falls off at inverse square of rotational speed, increases when viscosity increases, although increasing rate off. The slip, represented as an external friction coefficient, thermodynamically explained different (Δrc) in critical surface tension (rc) values disk, which will be proportional solubility parameter. An infinite representing nonslip flow, may given, Δrc zero. Spin‐off experiments liquids rc values, prepared differing ...

参考文章(6)
Warren W. Flack, David S. Soong, Alexis T. Bell, Dennis W. Hess, A mathematical model for spin coating of polymer resists Journal of Applied Physics. ,vol. 56, pp. 1199- 1206 ,(1984) , 10.1063/1.334049
Erhard Schnell, Slippage of Water over Nonwettable Surfaces Journal of Applied Physics. ,vol. 27, pp. 1149- 1152 ,(1956) , 10.1063/1.1722220
A. Acrivos, M. J. Shah, E. E. Petersen, On the Flow of a Non‐Newtonian Liquid on a Rotating Disk Journal of Applied Physics. ,vol. 31, pp. 963- 968 ,(1960) , 10.1063/1.1735785
Alfred G. Emslie, Francis T. Bonner, Leslie G. Peck, Flow of a Viscous Liquid on a Rotating Disk Journal of Applied Physics. ,vol. 29, pp. 858- 862 ,(1958) , 10.1063/1.1723300
B. D. Washo, Rheology and modeling of the spin coating process Ibm Journal of Research and Development. ,vol. 21, pp. 190- 198 ,(1977) , 10.1147/RD.212.0190
J. L. Gardon, RELATIONSHIP BETWEEN COHESIVE ENERGY DENSITIES OF POLYMERS AND ZISMAN'S CRITICAL SURFACE TENSIONS The Journal of Physical Chemistry. ,vol. 67, pp. 1935- 1936 ,(1963) , 10.1021/J100803A515