作者: Masahiro Yanagisawa
DOI: 10.1063/1.338194
关键词: Hildebrand solubility parameter 、 Mathematical model 、 Fluid dynamics 、 Thin film 、 Ellipsometry 、 Chromatography 、 Mechanics 、 Materials science 、 Surface tension 、 Slip (materials science) 、 Rotational speed
摘要: A flow for thin liquid films on rotating disks has been theoretically and experimentally studied. Liquid depletion behavior during a spin‐coating process is calculated by solving the Navier–Stokes equation, taking into account interface slip between disk. Excellent agreement seen model prediction experimental data. According to observed various parameters, half life falls off at inverse square of rotational speed, increases when viscosity increases, although increasing rate off. The slip, represented as an external friction coefficient, thermodynamically explained different (Δrc) in critical surface tension (rc) values disk, which will be proportional solubility parameter. An infinite representing nonslip flow, may given, Δrc zero. Spin‐off experiments liquids rc values, prepared differing ...