Effect of feed gas composition effects on the nanotribological properties of diamond-like carbon films
作者： Yeau-Ren Jeng , Ping-Chi Tsai , Kuan-Te Wu , Yi-Min Wang , Franklin Chau-Nan Hong
DOI: 10.1016/J.TSF.2012.03.107
关键词: Gas composition 、 Hydrogen 、 Materials science 、 Diamond-like carbon 、 Surface energy 、 Carbon film 、 Nanoindentation 、 Plasma-enhanced chemical vapor deposition 、 Carbon 、 Nanotechnology 、 Chemical engineering
摘要: Abstract A series of experimental nanoindentation, nanowear and nanoscratch tests was conducted to investigate the relationship between nanotribological characteristics diamond-like carbon (DLC) feed gas composition used for deposition. The DLC films were deposited on silicon substrates in radio-frequency plasma enhanced chemical vapor deposition system with a mixture hydrogen methane gases. Raman spectroscopy results show that integrated intensity ratios (I D /I G ) each profile correlate sp 2 /sp 3 ratios. result also indicates content source has significant influence upon ratio hydrogen-to-carbon films. It is demonstrated decreases increasing film. Our reveals characterizations films, namely lower leads higher hardness, elastic modulus, friction coefficient, wear depth. surface reinforcement can be attributed fact variation energy arises from different hybridized states (sp ratio), which improve properties via associated characteristics.
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