Micromirrors for wafer-scale fabrication of electrically-pumped VECSELs
作者： D.K. Serkland , G.A. Keeler , A. Mar , K.M. Geib , G.M. Peake
DOI:
关键词: Molding (process) 、 Optoelectronics 、 Materials science 、 Laser 、 Semiconductor laser theory 、 Fabrication 、 Scale (ratio) 、 Vertical-external-cavity surface-emitting-laser 、 Wafer 、 Laser beams 、 Optics
摘要: We describe the performance of a compact electrically-pumped vertical-external-cavity surface-emitting laser (VECSEL) that is designed for mass production. Instead using bulk external mirror, we have incorporated micromirror fabricated by wafer-scale precision molding.
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