Chemically prepared Pb(Zr,Ti)O/sub 3/ thin films: the effects of orientation and stress

作者: B.A. Tuttle , J.A. Voigt , T.J. Garino , D.C. Goodnow , R.W. Schwartz

DOI: 10.1109/ISAF.1992.300703

关键词: Compression (geology)CeramicCrystalliteMaterials scienceThin filmSubstrate (electronics)Orientation (geometry)Composite materialThermal expansionStress (mechanics)

摘要: The effects of orientation and stress on chemically prepared Pb(Zr,Ti)O/sub 3/ (PZT) film properties have been determined. Systematic modification the underlying substrate technology has made it possible to fabricate suites films that various degrees at a constant level, are in different states but similar orientation. Highly oriented following compositions fabricated: PZT 60/40, 40/60, 20/80. Remanent polarizations ( approximately=60 mu C/cm/sup 2/) greater than those best bulk polycrystalline ferroelectrics were obtained for 40/60 under compression highly

参考文章(9)
D.J. Eichorst, D.S. Hagberg, D.A. Payne, Processing and properties of sol-gel derived lithium niobate thin-layers international symposium on applications of ferroelectrics. pp. 250- 253 ,(1990) , 10.1109/ISAF.1990.200235
Koji Tominaga, Masaki Miyajima, Yukio Sakashita, Hideo Segawa, Masaru Okada, Preparation ofC-Axis-Oriented PLT Thin Films by the Metalorganic Chemical Vapor Deposition Method Japanese Journal of Applied Physics. ,vol. 29, pp. L1874- L1876 ,(1990) , 10.1143/JJAP.29.L1874
Kenji Iijima, Ryoichi Takayama, Yoshihiro Tomita, Ichiro Ueda, Epitaxial growth and the crystallographic, dielectric, and pyroelectric properties of lanthanum-modified lead titanate thin films Journal of Applied Physics. ,vol. 60, pp. 2914- 2919 ,(1986) , 10.1063/1.337078
Guanghua Yi, Zheng Wu, Michael Sayer, Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties Journal of Applied Physics. ,vol. 64, pp. 2717- 2724 ,(1988) , 10.1063/1.341613
D. Dimos, R.W. Schwartz, Electrooptic Properties of Pzt thin Films for Image Storage Applications MRS Proceedings. ,vol. 243, pp. 73- ,(1991) , 10.1557/PROC-243-73
Terry J. Garino, Mark Harrington, Residual Stress in Pzt Thin Films and its Effect on Ferroelectric Properties MRS Proceedings. ,vol. 243, pp. 341- ,(1991) , 10.1557/PROC-243-341
Toshio Ogawa, Atsuo Senda, Tohru Kasanami, Controlling the Crystal Orientations of Lead Titanate Thin Films Japanese Journal of Applied Physics. ,vol. 30, pp. 2145- 2148 ,(1991) , 10.1143/JJAP.30.2145
B.A. Tuttle, T.J. Headley, B.C. Bunker, R.W. Schwartz, T.J. Zender, C.L. Hernandez, D.C. Goodnow, R.J. Tissot, J. Michael, A.H. Carim, Microstructural evolution of Pb(Zr, Ti)O 3 thin films prepared by hybrid metallo-organic decomposition Journal of Materials Research. ,vol. 7, pp. 1876- 1882 ,(1992) , 10.1557/JMR.1992.1876