Three-Dimensional μ-Printing: An Enabling Technology

作者: Judith K. Hohmann , Michael Renner , Erik H. Waller , Georg von Freymann

DOI: 10.1002/ADOM.201500328

关键词: 3D printingMetamaterialNanotechnologyMaterials scienceFabricationLithographyPhotonicsMaskless lithographySpatial light modulatorNanophotonics

摘要: … reviews spatial light modulator (SLM) based laser lithography providing additional degrees … In Section 4.1 we review the properties of single building blocks, followed by mechanical …

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