作者: Judith K. Hohmann , Michael Renner , Erik H. Waller , Georg von Freymann
关键词: 3D printing 、 Metamaterial 、 Nanotechnology 、 Materials science 、 Fabrication 、 Lithography 、 Photonics 、 Maskless lithography 、 Spatial light modulator 、 Nanophotonics
摘要: … reviews spatial light modulator (SLM) based laser lithography providing additional degrees … In Section 4.1 we review the properties of single building blocks, followed by mechanical …